(262) 764-4832
(262) 764-4832
sales@Pro-mation-Inc.com |
PROMATION'S
EWL and EWU – 700 Wafer Magazine
Loading and Unloading
Model:
EWL and EWU – 700 Wafer Magazine
Loading and Unloading
Length: 560 mm Long x 475 mm Wide x 1200 mm High|
Frame Style: Precision extruded framing sealed with powder
coated vanity panels
Description:
PROMATION’s wafer handling stations can load 200 mm or 300 mm wafers to
the production process or accept 200 mm or 300 mm wafers from a variety of
processes and place each wafer into a magazine carrier. Compatible with
most cassettes. Single cassette system. Un-loader also available with
vertical buffer prior to cassette for continuous flow.
Standard Features:
-
 Programmable
Logic Controller
-
Touch Panel master
control screen
-
Class 10K complaint
machines available
-
Self monitoring
system with auto conversion
-
6” or 8” cassette
compatible (200 mm or 300 mm)
-
3 color light tower
and audible alarm system
-
Leveling feet with
roller wheels for easy movement to production floor
-
Left to right
process flow
-
Powder coated
vanity panels, “PROMATION White”
-
Conforms to SMEMA
Spec. 1.2 , NFPA 79 and Class 10K clean room
-
Includes standard
14 Pin communication cable (4 pin configuration)
Product Handling Capability:
Wafer:
200 mm or 300 mm (6” or 8”)
Facility Requirements:
Electrical:
Consumption: 110 VAC / 50-60 Hz 1 Phase 15 amp or
220 VAC / 50-60 Hz 1 Phase 15 amp Max 200 W at 1A
Air: 5 kgf/cm2 (71 PSI)
Line height: 950 mm (37.4”) +/- 30 mm
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